Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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== Scanning electron microscopy at Danchip== | == Scanning electron microscopy at Danchip== | ||
At Danchip there are | At Danchip there are five SEMs (scanning electron microscopes) that all cover a wide range of needs both in the cleanroom and outside: From the fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to the ultra high resolution images on any type of sample intended for publication. | ||
* The SEM Supra 1 is located in the basement outside the cleanroom, where it is serving two purposes: Serving the users that have samples from outside the cleanroom and serving as training tool; all new SEM users with no/little SEM experience must be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on other SEM's. | |||
* The Leo SEM is a very reliable and rugged instrument that provides high quality images of most samples. It is exclusively dedicated to the users of the Raith E-beam lithography system so general imaging of user samples is | * The SEM 2 and 3 are located in the cleanroom where they are being used for inspection of sample that have been fabricated in the cleanroom. Furthermore, SEM Supra is equipped with an EDX detector for analysis of the furnace materials | ||
* The SEM | |||
* The Leo SEM is a very reliable and rugged instrument that provides high quality images of most samples. It is exclusively dedicated to the users of the Raith E-beam lithography system so general imaging of user samples is not allowed. | |||
* The SEM Tabletop 1 is a tabletop SEM that is located in the basement outside the cleanroom. It is fast and easy to use, also for non-conducting samples. | |||
The two remaining SEM's at Danchip (called SEM Supra 2 and SEM Supra 3) serve as general imaging tools in the cleanroom. Like Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The SEM Supra 2 is also equipped with an airlock and an EDX detector. | The two remaining SEM's at Danchip (called SEM Supra 2 and SEM Supra 3) serve as general imaging tools in the cleanroom. Like Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The SEM Supra 2 is also equipped with an airlock and an EDX detector. | ||