Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

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 * Thick polymers, glass or quartz samples
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+* Conducting samples
+* Semi-conducting samples
+* Thin (~ 5 µm <) layers of non-conducting materials such as polymers
+* Thick polymers, glass or quartz samples
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 * Conductive samples-->
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 *Cleanroom of DTU Danchip
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+*Basement of DTU Danchip
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 *DTU CEN-->
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 * ~3.5 nm (limited by instrument)-->
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+* ~3.5 nm (limited by instrument)
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 !style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics
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 * CCD camera -->
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+* Secondary electron (SE)
+* Backscatter electron (BSE)
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 * Any standard cleanroom materials
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+* Any standard cleanroom material and samples from the 	Laser Micromachining tool and the Polymer Injection Molding tool
+* Some biological samples (ask for permission)
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 * Conductive materials