Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
| Line 6: | Line 6: | ||
<gallery caption="Some chemicals of the MVD and the surface reaction" heights="300px" perrow="2"> | <gallery caption="Some chemicals of the MVD and the surface reaction" heights="300px" perrow="2"> | ||
image:chlorosilanes.jpg| Different chemicals for the MVD. | image:chlorosilanes.jpg|Different chemicals for the MVD. | ||
image:MVDsurfacereaction.jpg|The chemical reaction in which the Cl atoms of the precursors are eliminated under formation of HCl. | image:MVDsurfacereaction.jpg|The chemical reaction in which the Cl atoms of the precursors are eliminated under formation of HCl. | ||
</gallery> | </gallery> | ||