Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
| Line 65: | Line 65: | ||
|+ The flat recipe | |+ The flat recipe | ||
|- | |- | ||
! rowspan="2" align="center"| | ! rowspan="3" align="center"| O<sub>2</sub> plasma | ||
! rowspan="3" align="center"| | ! rowspan="3" align="center"| Chemical # 1 (vapor order 1) | ||
! rowspan="3" align="center"| Chemical # 2 (vapor order 2) | |||
! Processing | |||
|- | |- | ||
! | ! Flow | ||
! Setting | ! Setting | ||
! Parameter | ! Parameter | ||