Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide: Difference between revisions
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*Test by Zhibo Li @Danchip ''dec. 2016'' - based on the work of Peixiong and Berit: [[:File:Zhibo Li SiO2 ICP etch (dose205).docx]] | *Test by Zhibo Li @Danchip ''dec. 2016'' - based on the work of Peixiong and Berit: [[:File:Zhibo Li SiO2 ICP etch (dose205).docx]] | ||
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