Specific Process Knowledge/Imprinting: Difference between revisions
No edit summary |
|||
| Line 8: | Line 8: | ||
== Choose an equipment == | == Choose an equipment == | ||
*MVD - ''Molecular Vapor Deposition - Antistiction coater for silicon stamps'' | *[[Thin_film_deposition/MVD|MVD]] - ''Molecular Vapor Deposition - Antistiction coater for silicon stamps'' | ||
*Drop Shape Analyzer - ''Tool to measure the hydrophobicity of the antistiction layer'' | *Drop Shape Analyzer - ''Tool to measure the hydrophobicity of the antistiction layer'' | ||
*[[/EVG NIL|EVG NIL]] - ''Aligner and imprinting tool'' | *[[/EVG NIL|EVG NIL]] - ''Aligner and imprinting tool'' | ||