Specific Process Knowledge/Thin film deposition/Deposition of NiV: Difference between revisions
| Line 85: | Line 85: | ||
* Carbon | * Carbon | ||
| | | | ||
* Silicon | |||
* Silicon oxide | * Silicon oxide | ||
* Silicon nitride | |||
* Silicon (oxy)nitride | * Silicon (oxy)nitride | ||
* Photoresist | * Photoresist | ||
| Line 92: | Line 94: | ||
* SU-8 | * SU-8 | ||
* Metals | * Metals | ||
* Carbon | |||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
! Comment | ! Comment | ||