Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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* Bring the bottle inside gowning; clean it thoroughly '''on the outside''' with water or alcohol | * Bring the bottle inside gowning; clean it thoroughly '''on the outside''' with water or alcohol | ||
* Bring the bottle to a fumehood inside the cleanroom; clean the bottle and the lid thoroughly '''on the inside''' with the main solvent of your resist. For CSAR, ZEP, mr EBL, and most PMMAs, it is anisole. If in doubt which solvent your e-beam resist contains, read the MSDS of the resist to be found [http://kemibrug.dk/searchpage/ here]. | * Bring the bottle to a fumehood inside the cleanroom; clean the bottle and the lid thoroughly '''on the inside''' with the main solvent of your resist. For CSAR, ZEP, mr EBL, and most PMMAs, it is anisole. If in doubt which solvent your e-beam resist contains, read the MSDS of the resist to be found [http://kemibrug.dk/searchpage/ here]. | ||
* If you need to dilute the resist, find a measurement beaker and clean it thorughly in same solvent as your own bottle. For CSAR, ZEP, mr EBL, and anisole-based PMMA, you can use the measurement beaker in the box inside the fumehood in | * If you need to dilute the resist, find a measurement beaker and clean it thorughly in same solvent as your own bottle. For CSAR, ZEP, mr EBL, and anisole-based PMMA, you can use the measurement beaker in the box inside the fumehood in E-4. | ||
* Let the bottle dry in the fumehood. | * Let the bottle dry in the fumehood. | ||
* Bring the (main) bottle of resist to the fumehood. Carefully unscrew the lid of the resist bottle. '''If necessary, wipe the thread of the resist bottle before you pour resist into your own bottle'''; dried resists may sit on the thread and be transferred into your bottle (or worse into the large resist bottle) when pouring. | * Bring the (main) bottle of resist to the fumehood. Carefully unscrew the lid of the resist bottle. '''If necessary, wipe the thread of the resist bottle before you pour resist into your own bottle'''; dried resists may sit on the thread and be transferred into your bottle (or worse into the large resist bottle) when pouring. | ||