Specific Process Knowledge/Lithography/Baking: Difference between revisions
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Comming soon. | Comming soon. | ||
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Spincoater: Gamma UV: | '''Spincoater: Gamma UV:''' | ||
* TM16 @ 110°C: Mean temp 110.1°C, uniformity error 0.23%. | * TM16 @ 110°C: Mean temp 110.1°C, uniformity error 0.23%. | ||
* TM15 @ 100°C: Mean temp 99.5°C, uniformity error 0.95%. | * TM15 @ 100°C: Mean temp 99.5°C, uniformity error 0.95%. | ||
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* TM13 @ 110°C: Mean temp 108.6°C, uniformity error 1.45%. | * TM13 @ 110°C: Mean temp 108.6°C, uniformity error 1.45%. | ||
Developer: TMAH UV-lithography: | '''Developer: TMAH UV-lithography:''' | ||
Coming soon. | Coming soon. | ||
Spincoater: Süss stepper: | '''Spincoater: Süss stepper:''' | ||
Coming soon. | Coming soon. | ||
Developer: Stepper: | '''Developer: Stepper:''' | ||
Coming soon. | Coming soon. | ||