Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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*Choose measurement mode 'Semi Auto' | *Choose measurement mode 'Semi Auto' | ||
*enter the material size and slot number (e.g 4A) | *enter the material size and slot number (e.g 4A) | ||
*enter the material center offset (from the pre-alignment) and design (L-edit/Clewin) | *enter the material center offset (from the pre-alignment) and design coordinates (from L-edit/Clewin) of P mark and Q mark. | ||
*In P-mark rough/fine scan settings, adjust scan settings and enter the width of your marks. Also check the gain settings are ok. | *In P-mark rough/fine scan settings, adjust scan settings and enter the width of your marks. Also check the gain settings are ok. | ||
*Repeat point 4 for Q-mark rough/fine | *Repeat point 4 for Q-mark rough/fine | ||