Specific Process Knowledge/Lithography/Coaters/SprayCoater: Difference between revisions
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The spray coating process as well as major features of the three nozzles are described into more detail in the manual which can be found via the Equipment Info page in LabManager under the Documents sections. The manual can also be found by clicking [http://labmanager.dtu.dk/d4Show.php?id=2523&mach=293 this direct link]. | The spray coating process as well as major features of the three nozzles are described into more detail in the manual which can be found via the Equipment Info page in LabManager under the Documents sections. The manual can also be found by clicking [http://labmanager.dtu.dk/d4Show.php?id=2523&mach=293 this direct link]. | ||
'''Further information about the spray coater (current status, | '''Further information about the spray coater (current status, process log, APV, technical information etc. can be found in LabManger''': | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=293 Spray coater in LabManager]''' | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=293 Spray coater in LabManager]''' | ||