Specific Process Knowledge/Etch/Etching of Bulk Glass: Difference between revisions
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*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon|Sputtered silicon (Alcatel)]] (bad adhesion and step coverage) | *[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon|Sputtered silicon (Alcatel)]] (bad adhesion and step coverage) | ||
*We are testing other masks at the moment (ask BGE) | |||
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