Specific Process Knowledge/Lithography/Baking: Difference between revisions
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==Gamma hotplates== | ==Gamma hotplates== | ||
[[Image:HMDS gammaUV.jpg|300x300px|thumb|Hotplate modules in Gamma UV spincoater.]] | [[Image:HMDS gammaUV.jpg|300x300px|thumb|Hotplate modules in Gamma UV spincoater.]] | ||
Hotplate temperatures are recipe dependent. | |||
'''Information about the spincoater can be found in labadviser: [http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_UV Spin Coater: Gamma UV] or labmanager: [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=258 Spin Coater: Gamma UV]''' | '''Information about the spincoater can be found in labadviser: [http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_UV Spin Coater: Gamma UV] or labmanager: [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=258 Spin Coater: Gamma UV]''' | ||