Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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* Boron Glass: 85.4° [84.4°] | * Boron Glass: 85.4° [84.4°] | ||
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Fast recipe [standard recipe]: | Fast recipe [standard recipe]: | ||
* Si (native oxide): | * Si (native oxide): 72.9° [81.0°] | ||
* SiO<sub>2</sub> (110 nm): | * SiO<sub>2</sub> (110 nm): 71.0° [79.7°] | ||
* Boron Glass: | * Boron Glass: 90.7° [96.2°] | ||
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