Specific Process Knowledge/Imprinting: Difference between revisions
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*MVD - ''Molecular Vapor Deposition - Antistiction coater for silicon stamps'' | *MVD - ''Molecular Vapor Deposition - Antistiction coater for silicon stamps'' | ||
*Drop Shape Analyzer - ''Tool to measure the hydrophobicity of the antistiction layer'' | *Drop Shape Analyzer - ''Tool to measure the hydrophobicity of the antistiction layer'' | ||
*[[/EVG NIL|EVG NIL]] - ''Aligner and imprinting tool'' | *[[/EVG NIL|EVG NIL]] - ''Aligner and imprinting tool'' | ||