Specific Process Knowledge/Lithography/Baking: Difference between revisions
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Film or pattern of all types except type IV | Film or pattern of all types except type IV | ||
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Hotplate dependent. | |||
(All substrates and film or pattern of all types, unless otherwise noted on the hotplate) | |||
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Silicon and glass substrates | Silicon and glass substrates | ||
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Pb, Te films | Pb, Te films | ||
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Hotplate dependent. Any restrictions will be noted on the hotplate. | |||
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