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Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions

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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,871 edits
Line 347: Line 347:
'''The user manual, user APV, and contact information can be found in LabManager:'''
'''The user manual, user APV, and contact information can be found in LabManager:'''


[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=358 Oven: HMDS 2 in LabManager]
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=358 Spincoater: Gamma UV]
 
===Process information===
 
===Equipment performance and process related parameters===


<br clear="all" />
<br clear="all" />
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