Specific Process Knowledge/Lithography/Baking: Difference between revisions
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==Gamma hotplates== | ==Gamma hotplates== | ||
[[Image:HMDS gammaUV.jpg|300x300px|thumb|Hotplate modules in Gamma UV spincoater.]] | [[Image:HMDS gammaUV.jpg|300x300px|thumb|Hotplate modules in Gamma UV spincoater.]] | ||
http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_UV | '''Information about the spincoater can be found in labadviser: [http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_UV]''' | ||
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