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Specific Process Knowledge/Lithography/Baking: Difference between revisions

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==Gamma hotplates==   
==Gamma hotplates==   
[[Image:HMDS GammaUV.jpg|300x300px|thumb|Hotplate modules in Gamma UV spincoater.]]
[[Image:HMDS gammaUV.jpg|300x300px|thumb|Hotplate modules in Gamma UV spincoater.]]
The  
The  
http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_UV


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