Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
| Line 135: | Line 135: | ||
<pre> | <pre> | ||
auto calib file calibrations | auto calib file calibrations | ||
NO ALIGNMENT | |||
DRF5M INITIAL: HEIMAP, CURRNT, DRIFT | DRF5M INITIAL: HEIMAP, CURRNT, DRIFT | ||
CYCLIC: CURRNT, DRIFT (every 5 minutes without interupting the writing of a field) | CYCLIC: CURRNT, DRIFT (every 5 minutes without interupting the writing of a field) | ||