Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions

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	'''7.''' In the jdf-file, the design coordinates of the P and Q marks should be defined. In the sdf-file the mark-detection should be set to semi-automatic 'S' ~~(see section 7 in this manual and the separate sdf- and jdf-file preparation manual)~~. In the sdf-file, enter the material center offset out put from PAMS.		'''7.''' In the jdf-file, the design coordinates of the P and Q marks should be defined. In the sdf-file the mark-detection should be set to semi-automatic 'S'. In the sdf-file, enter the material center offset out put from PAMS.