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{| border="2" cellspacing="0" cellpadding="0"  
{| border="2" cellspacing="0" cellpadding="0"  
!colspan="2" border="none" style="background:silver; color:black;" align="center |Equipment  
!colspan="2" border="none" style="background:silver; color:black;" align="center |Equipment  
|style="background:WhiteSmoke; color:black" align="center"|FEI Quanta 200 FEG ESEM
|style="background:WhiteSmoke; color:black" align="center"|FEI QFEG 200 Cryo ESEM
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!style="background:silver; color:black;" align="center" width="60"| Purpose  
!style="background:silver; color:black;" align="center" width="60"| Purpose  
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
|style="background:LightGrey; color:black" rowspan="2"|Resolution
|style="background:LightGrey; color:black" rowspan="2"|Resolution
|style="background:Whitesmoke; color:black" colspan="1" align="left"|The resolution of Quanta FEG dependends on the sample and the operation mode!
|style="background:Whitesmoke; color:black" colspan="1" align="left"|The resolution of QFEG dependends on the sample and the operation mode!
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|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|

Revision as of 09:34, 7 February 2019

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DTU Cen's Quanta FEG positioned in building 307 room no. xx


The FEI Quanta 200 ESEM FEG is a field emission scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can operate in several modes, such as high vacuum, low vacuum, environmental mode, room temperature, low temperature and cryo. Our Quanta FEG is fitted with an EDS detector, which allows for analytical measurements in all the operation modes.

Process information

  • Electron source

Field emission gun

  • Accelerating voltage

500 V- 30 kV

  • Resolution

2 nm at 30 kV (SE)

  • Imaging detectors

Everhart-Thornley (SE/BSE), Solid State BSE, Large Field, Gaseous SE, Gaseous BSE, Gaseous Analytical, STEM, vCD and CCD Camera

  • Imaging modes

High, low vacuum and environmental

  • Analytical capabilities

Energy dispersive X-rays (Oxford Instruments 80 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)

  • Attachments

Quorum PP2000 Cryo System, FEI Peltier stage (-10°C to 22°C).

Equipment performance and process related parameters

Equipment FEI QFEG 200 Cryo ESEM
Purpose Vizualization and Microanalysis
  • Vizualization of surfaces (topography and Z contrast)
  • Vizualization of projected image (BF STEM image)
  • Energy Dispersive X-ray analysis
Performance Resolution The resolution of QFEG dependends on the sample and the operation mode!
  • 2 nm at 30 keV for Au on C sample with the ETD detector
Instrument specifics Detectors
  • ETD- Everhart-Thornley for secondary electrons
  • BSD- Solid state Back Scattered Detector
  • LFD- Large Field Detector for secondary electrons
  • GSED- Gaseous Secondary Electron Detector
  • GBSD- Gaseous Backscattered Electron Detector
  • GAD- Gaseous Analystical Detector
  • STEM- right field Scanning Tramission Electron detector
  • vCD- low voltage BSED
  • CCD camera
Electron source
  • Field Emission - Tungsten filament
Stage (room temperature)
  • X, Y: 25 × 25 mm
  • T: 0 to 60o (Full tilt require removment of cryo cold trap.)
  • R: 360o
Peltier stage
  • FEI Peltier stage -10o to 22o
Cryo stage
  • Quorum PP2000 Cryo System
EDS
  • Oxford Instruments 80 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV
Operating pressures
  • High vacuum (10-4 Pa), Low vacuum and Enviromental mode (up to 2700Pa)
Substrates Sample sizes
  • No actual limit (limitted by stage movment and detector position).
Allowed materials
  • Conducttors, Semiconductors,Insulators,Wet Samples, Biological (not pathogents!)
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