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Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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← Older edit
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Revision as of 15:12, 14 July 2016
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DCH-Employees-701
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Mounting of chips or wafers into cassette
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Revision as of 09:06, 15 July 2016
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Tigre
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DCH-Employees-701
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Mounting of chips or wafers into cassette
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Line 125:
Line 125:
Seen from the front-side of the cassette with the hook to the right, the workpiece windows (wafer positions) are named A, B, C etc in reading-direction from top left to bottom right.
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