Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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= Open EBX Menu (if not already open)= | |||
On desktop one, | |||
* Click on the arrow above 'CPU disk', and open a console | |||
* In the console, type 'ebxmenu' | |||
= Transfer of cassettes between autoloader and e-beam writer = | = Transfer of cassettes between autoloader and e-beam writer = | ||