Specific Process Knowledge/Thin film deposition/Deposition of Silicon: Difference between revisions
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|Adhesion | |Adhesion | ||
|Bad for pyrex, for other materials we do not know | |Bad for pyrex, for other materials we do not know | ||
|Good for | |Good for fused silica, silicon oxide, silicon nitride, silicon | ||
|- | |- | ||
|Substrate material allowed | |Substrate material allowed | ||
|Pyrex, | |Pyrex, fused silica, silicon, metals, oxide, nitride, blue tape | ||
| | |Fused silica, Silicon, oxide, nitride | ||
|- | |- | ||
|Doping facility | |Doping facility | ||