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Specific Process Knowledge/Lithography/mrEBL6000: Difference between revisions

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|'''Comments'''
|'''Comments'''
|'''Technical reports'''
|'''Technical reports'''
|'''Spinner'''
|'''Developer'''
|'''Developer'''
|'''Rinse'''
|'''Rinse'''
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|Standard negative resist
|Standard negative resist
|[[media:mrEBL6000 Processing Guidelines.pdf‎|mrEBL6000 processing Guidelines.pdf‎]]
|[[media:mrEBL6000 Processing Guidelines.pdf‎|mrEBL6000 processing Guidelines.pdf‎]]
|[[Specific_Process_Knowledge/Lithography/Coaters#Manual Spinner 1|Manual Spinner 1 (Laurell)]], [[Specific_Process_Knowledge/Lithography/Coaters#Spin_coater:_Manual_Labspin|Spin Coater Labspin]]
|mr DEV
|mr DEV
|IPA
|IPA
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