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Specific Process Knowledge/Lithography/mrEBL6000: Difference between revisions

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== Spin Curve ==
== Spin Curve ==
[[File:SpinCurveMrEBL6000.jpg|right|600px]]
[[File:image001.png|right|600px]]


The thickness is measured on VASE Ellipsometer using a simple Cauchy model for a transparent polymer on Si. The measurements are performed at one incidence angle (70 degrees) only.
The thickness is measured on VASE Ellipsometer using a simple Cauchy model for a transparent polymer on Si. The measurements are performed at one incidence angle (70 degrees) only.
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|-
|-
|-style="background:Black; color:White"
|-style="background:blue; color:White"
!colspan="7"|MicroResist mr EBL 6000 spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 14-07-2014. Softbake 3 min @ 110 degC.
!colspan="7"|MicroResist mr EBL 6000 spinning on Spin Coater: Manual LabSpin A-5, WILTID, 2015. Softbake 3 min @ 110 degC.
|-
|-


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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!Spin Speed [rpm]
!Spin Speed [rpm]
!Acceleration [1/s2]
!Thickness [nm]
!Thickness [nm]
!St Dev
!St Dev
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|2000
|2000
|103
|0.5
|-
|-
|-style="background:WhiteSmoke; color:black"
|3000
|88
|0.4
|-
|-
|-style="background:WhiteSmoke; color:black"
|4000
|78
|0.4
|-
|-
|-style="background:WhiteSmoke; color:black"
|5000
|71
|0.7
|-
|-
|-style="background:WhiteSmoker; color:black"
|6000
|68
|0.5
|-
|-
|-style="background:WhiteSmoker; color:black"
|7000
|66
|0.6
|-
|}
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  style="width: 40%"
|-
|-
|-style="background:red; color:White"
!colspan="7"|MicroResist mr EBL 6000 spinning on Spin Coater: Manual LabSpin A-5, WILTID, 2015. Softbake 3 min @ 110 degC.
|-
|-
|-style="background:WhiteSmoke; color:black"
!Spin Speed [rpm]
!Thickness [nm]
!St Dev
|-
|-
|-style="background:WhiteSmoke; color:black"
|2000
|2000
|101.93
|50
|0.81
|0.2
|-
|-


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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|3000
|3000
|2000
|42
|87.19
|0.5
|0.77
|-
|-


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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|4000
|4000
|2000
|38
|76.88
|0.5
|0.5
|-
|-
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|5000
|5000
|2000
|34
|71.18
|0.3
|0.57
|-
|-


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|-style="background:WhiteSmoker; color:black"
|-style="background:WhiteSmoker; color:black"
|6000
|6000
|2000
|32
|69.12
|0.3
|0.53
|-
 
|-
|-style="background:WhiteSmoker; color:black"
|7000
|32
|0.3
|-
|-


|}
|}
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