Specific Process Knowledge/Characterization/XPS/Processing/Basics: Difference between revisions

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# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro|Survey spectra analysis: Open data, spectrum views, depth profile, survey spectrum peak identification, click here]]
# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro|Survey spectra analysis: Open data]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Spectrum_views|Spectrum views]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Views_of_data_with_several_etch_levels|View of data with several levels]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Zooming|Zooming]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Automatic_peak_identification_of_survey_spectra|Automatic peak ID]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Zooming|Zooming]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Manually_add_peaks_to_identification_of_survey_spectra|Manual ID]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Make_a_depth_profile_from_survey_spectrum|Depth profile]]
 
# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres|High resolution spectra analysis: Open spectra, add background and peaks, apply constraints to fitting]]
# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres|High resolution spectra analysis: Open spectra, add background and peaks, apply constraints to fitting]]
# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/3fitting|Complete the analysis]]
# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/3fitting|Complete the analysis]]

Revision as of 10:26, 27 June 2016

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XPS data processing guide

This section is intended as an introduction to the analysis of XPS data. Simple examples are chosen to illustrate the procedures. All actions performed with Avantage (version 5.498) during an analysis of a sample are shown.

In case you want to follow along with your own analysis, you can download the data from here (this file is a .zip file that has been renamed to .doc in order to be uploaded to LabAdviser, so download and rename to .zip and extract the files)

  1. Survey spectra analysis: Open data, spectrum views, depth profile, survey spectrum peak identification, click here
  2. High resolution spectra analysis: Open spectra, add background and peaks, apply constraints to fitting
  3. Complete the analysis


  1. Survey spectra analysis: Open data
    1. Spectrum views
    2. View of data with several levels
    3. Zooming
    4. Automatic peak ID
    5. Zooming
    6. Manual ID
    7. Depth profile
  1. High resolution spectra analysis: Open spectra, add background and peaks, apply constraints to fitting
  2. Complete the analysis
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