Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Line 28: Line 28:
| 3      <!-- platen power -->
| 3      <!-- platen power -->
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]]    <!-- link processes -->
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]]    <!-- link processes -->
| NA     <!-- keywords -->
| Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen     <!-- keywords -->
|-
|-
! Isoslow7      <!-- recipe name -->
! Isoslow7      <!-- recipe name -->

Revision as of 16:34, 1 March 2018


Mediumiso
Recipe Step Temperature Pressure C4F8 SF6 O2 Ar Coil Platen Runs Key words
Mediumiso1 - 20 25 0 150 0 0 600 3 1 Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen
Isoslow7 - 10 10 0 80 0 0 150 3 1
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