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{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
|+ '''Travkatesting2: Process A run for 55 cycles on travka 5, 10, 20, 35, 50 masks'''
|-
! width="30" rowspan="2" | Date
! width="40" rowspan="2"| Substrate Information
! width="50" rowspan="2"| Process Information
! colspan="15"| SEM images of trenches
! rowspan="2" | Numbers
|-
! 2 µm
! 3 µm
! 4 µm
! 6 µm
! 8 µm
! 10 µm
! 15 µm
! 25 µm
! 40 µm
! 50 µm
! 75 µm
! 100 µm
! 150 µm
! 200 µm
! 300 µm
|-
| January 2013
| Travka05, AZ 5214, '''5% open'''
| Process A 55 cycles or 10:05 minutes, '''C01548.01'''
| [[file:C01548.01 002mu0025.jpg |75px|frameless ]]
| [[file:C01548.01 003mu0026.jpg |75px|frameless ]]
| [[file:C01548.01 004mu0024.jpg |75px|frameless ]]
| [[file:C01548.01 006mu0023.jpg |75px|frameless ]]
| [[file:C01548.01 008mu0022.jpg |75px|frameless ]]
| [[file:C01548.01 010mu0021.jpg |75px|frameless ]]
| [[file:C01548.01 015mu0020.jpg |75px|frameless ]]
| [[file:C01548.01 025mu0019.jpg |75px|frameless ]]
| [[file:C01548.01 040mu0018.jpg |75px|frameless ]]
| [[file:C01548.01 050mu0016.jpg |75px|frameless ]]
| [[file:C01548.01 075mu0015.jpg |75px|frameless ]]
| [[file:C01548.01 100mu0014.jpg |75px|frameless ]]
| [[file:C01548.01 150mu0013.jpg |75px|frameless ]]
| [[file:C01548.01 200mu0012.jpg |75px|frameless ]]
| [[file:C01548.01 300mu0011.jpg |75px|frameless ]]
|
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width'''
| align="center" style="background:#f0f0f0;"|'''2'''
| align="center" style="background:#f0f0f0;"|'''3'''
| align="center" style="background:#f0f0f0;"|'''4'''
| align="center" style="background:#f0f0f0;"|'''6'''
| align="center" style="background:#f0f0f0;"|'''8'''
| align="center" style="background:#f0f0f0;"|'''10'''
| align="center" style="background:#f0f0f0;"|'''15'''
| align="center" style="background:#f0f0f0;"|'''25'''
| align="center" style="background:#f0f0f0;"|'''40'''
| align="center" style="background:#f0f0f0;"|'''50'''
| align="center" style="background:#f0f0f0;"|'''75'''
| align="center" style="background:#f0f0f0;"|'''100'''
| align="center" style="background:#f0f0f0;"|'''150'''
| align="center" style="background:#f0f0f0;"|'''200'''
| align="center" style="background:#f0f0f0;"|'''300'''
|-
| Etched depth (µm)||92||106||113||126||136||146||161||181||200||208||222||230||238||243||248
|-
| Av. ER (µm/min)||9,2||10,5||11,2||12,5||13,5||14,4||16,0||18,0||19,9||20,7||22,0||22,8||23,6||24,1||24,6
|-
| Av. ER (nm/cyc)||1679||1918||2054||2294||2473||2648||2933||3299||3641||3786||4038||4184||4324||4409||4507
|-
| Sdewll bowing (%)||0,3%||0,2%||0,2%||0,3%||0,3%||0,2%||0,0%||0,2%||0,2%||-0,3%||0,1%||0,1%||0,2%||0,2%||-0,1%
|-
| Sdewll angle(degs)||90,4||90,3||90,5||90,8||90,6||90,9||91,0||90,9||90,9||91,0||90,9||90,9||91,1||91,2||91,4
|-
| Trench width (µm)||4,8||7,1||7,7||9,7||12,6||14,1||20,0||30,3||46,3||56,4||82,5||107,3||156,9||206,7||308,6
|-
|}
|-
| January 2013
| Travka10, AZ 5214, '''10% open'''
| Process A 55 cycles or 10:05 minutes, '''C01548.02'''
|[[file:C01548.02 2mu  0001.jpg |75px|frameless ]]
|[[file:C01548.02 3mu  0002.jpg |75px|frameless ]]
|[[file:C01548.02 4mu  0003.jpg |75px|frameless ]]
|[[file:C01548.02 6mu  0004.jpg |75px|frameless ]]
|[[file:C01548.02 8mu  0005.jpg |75px|frameless ]]
|[[file:C01548.02 010mu0006.jpg |75px|frameless ]]
|[[file:C01548.02 015mu0007.jpg |75px|frameless ]]
|[[file:C01548.02 025mu0008.jpg |75px|frameless ]]
|[[file:C01548.02 040mu0009.jpg |75px|frameless ]]
|[[file:C01548.02 050mu0132.jpg |75px|frameless ]]
|[[file:C01548.02 075mu0133.jpg |75px|frameless ]]
|[[file:C01548.02 100mu 0135.jpg |75px|frameless ]]
|[[file:C01548.02 150mu 0134.jpg |75px|frameless ]]
|[[file:C01548.02 200mu 0136.jpg |75px|frameless ]]
|[[file:C01548.02 300mu 0138.jpg |75px|frameless ]]
|
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
| align="center" style="background:#f0f0f0;"|'''2'''
| align="center" style="background:#f0f0f0;"|'''3'''
| align="center" style="background:#f0f0f0;"|'''4'''
| align="center" style="background:#f0f0f0;"|'''6'''
| align="center" style="background:#f0f0f0;"|'''8'''
| align="center" style="background:#f0f0f0;"|'''10'''
| align="center" style="background:#f0f0f0;"|'''15'''
| align="center" style="background:#f0f0f0;"|'''25'''
| align="center" style="background:#f0f0f0;"|'''40'''
| align="center" style="background:#f0f0f0;"|'''50'''
| align="center" style="background:#f0f0f0;"|'''75'''
| align="center" style="background:#f0f0f0;"|'''100'''
| align="center" style="background:#f0f0f0;"|'''150'''
| align="center" style="background:#f0f0f0;"|'''200'''
| align="center" style="background:#f0f0f0;"|'''300'''
|-
| Etched depth (µm)||90||101||108||121||130||138||152||171||189||198||210||218||228||232||239
|-
| Av. ER (µm/min)||8,9||10,0||10,7||12,0||12,9||13,7||15,1||16,9||18,8||19,6||20,9||21,6||22,6||23,1||23,7
|-
| Av. Scllp hght (nm)||1639||1834||1964||2192||2356||2508||2772||3103||3441||3601||3825||3961||4143||4227||4346
|-
| Sdwall bowing (%)||0,40||0,19||0,25||0,16||0,04||0,12||0,16||-0,18||-0,04||0,00||0,04||-0,08||-0,20||-0,05||-0,05
|-
| Sdwall angle (degs)||90,2||90,3||90,5||90,5||90,6||90,7||90,8||91,1||91,1||91,1||91,1||91,2||91,2||91,3||91,6
|-
| Trench width (µm)||5,2||7,2||8,2||10,9||13,2||15,5||20,6||31,3||46,5||56,1||81,2||107,2||158,9||211,1||306,2
|-
|}
|-
| January 2013
| Travka20, AZ 5214, '''20% open'''
| Process A 55 cycles or 10:05 minutes, '''C01548.03'''
| [[file:C01548.03 002mu0041.jpg |75px|frameless ]]
| [[file:C01548.03 003mu0040.jpg |75px|frameless ]]
| [[file:C01548.03 004mu0039.jpg |75px|frameless ]]
| [[file:C01548.03 006mu0038.jpg |75px|frameless ]]
| [[file:C01548.03 008mu0037.jpg |75px|frameless ]]
| [[file:C01548.03 010mu0036.jpg |75px|frameless ]]
| [[file:C01548.03 015mu0035.jpg |75px|frameless ]]
| [[file:C01548.03 025mu0034.jpg |75px|frameless ]]
| [[file:C01548.03 040mu0033.jpg |75px|frameless ]]
| [[file:C01548.03 050mu0032.jpg |75px|frameless ]]
| [[file:C01548.03 075mu0031.jpg |75px|frameless ]]
| [[file:C01548.03 100mu0030.jpg |75px|frameless ]]
| [[file:C01548.03 150mu0029.jpg |75px|frameless ]]
| [[file:C01548.03 200mu0028.jpg |75px|frameless ]]
| [[file:C01548.03 300mu0027.jpg |75px|frameless ]]
|
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
| align="center" style="background:#f0f0f0;"|'''2'''
| align="center" style="background:#f0f0f0;"|'''3'''
| align="center" style="background:#f0f0f0;"|'''4'''
| align="center" style="background:#f0f0f0;"|'''6'''
| align="center" style="background:#f0f0f0;"|'''8'''
| align="center" style="background:#f0f0f0;"|'''10'''
| align="center" style="background:#f0f0f0;"|'''15'''
| align="center" style="background:#f0f0f0;"|'''25'''
| align="center" style="background:#f0f0f0;"|'''40'''
| align="center" style="background:#f0f0f0;"|'''50'''
| align="center" style="background:#f0f0f0;"|'''75'''
| align="center" style="background:#f0f0f0;"|'''100'''
| align="center" style="background:#f0f0f0;"|'''150'''
| align="center" style="background:#f0f0f0;"|'''200'''
| align="center" style="background:#f0f0f0;"|'''300'''
|-
| Etched depth (µm)||75||85||92||103||111||117||130||148||164||170||181||188||194||199||203
|-
| Av. ER (µm/min)||7,5||8,4||9,1||10,2||11,0||11,6||12,9||14,7||16,2||16,8||17,9||18,6||19,3||19,7||20,1
|-
| Av. Scllp hght (nm)||1371||1543||1676||1874||2019||2133||2368||2692||2978||3086||3286||3412||3533||3619||3686
|-
| Sdwall bowing (%)||0,46||0,59||0,40||0,42||0,40||0,28||0,35||0,18||0,36||0,36||0,26||0,58||0,40||0,31||0,05
|-
| Sdwall angle (degs)||90,1||90,4||90,4||90,5||90,8||90,6||91,1||91,3||91,4||91,5||91,5||91,7||91,8||91,8||92,2
|-
| Trench width (µm)||4,9||6,1||7,8||10,4||12,2||14,9||19,9||30,5||46,3||57,4||82,3||106,6||158,1||209,0||309,7
|-
|}
|-
| January 2013
| Travka35, AZ 5214, '''35% open'''
| Process A 55 cycles or 10:05 minutes, '''C01548.04'''
| [[file:C01548.04 002mu 0042.jpg |75px|frameless ]]
| [[file:C01548.04 003mu 0043.jpg |75px|frameless ]]
| [[file:C01548.04 004mu 0044.jpg |75px|frameless ]]
| [[file:C01548.04 006mu 0046.jpg |75px|frameless ]]
| [[file:C01548.04 008mu 0047.jpg |75px|frameless ]]
| [[file:C01548.04 010mu 0048.jpg |75px|frameless ]]
| [[file:C01548.04 015mu 0049.jpg |75px|frameless ]]
| [[file:C01548.04 025mu 0050.jpg |75px|frameless ]]
| [[file:C01548.04 040mu 0051.jpg |75px|frameless ]]
| [[file:C01548.04 050mu 0052.jpg |75px|frameless ]]
| [[file:C01548.04 075mu 0053.jpg |75px|frameless ]]
| [[file:C01548.04 100mu 0054.jpg |75px|frameless ]]
| [[file:C01548.04 150mu 0055.jpg |75px|frameless ]]
| [[file:C01548.04 200mu 0056.jpg |75px|frameless ]]
| [[file:C01548.04 300mu 0057.jpg |75px|frameless ]]
|
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
| align="center" style="background:#f0f0f0;"|'''2'''
| align="center" style="background:#f0f0f0;"|'''3'''
| align="center" style="background:#f0f0f0;"|'''4'''
| align="center" style="background:#f0f0f0;"|'''6'''
| align="center" style="background:#f0f0f0;"|'''8'''
| align="center" style="background:#f0f0f0;"|'''10'''
| align="center" style="background:#f0f0f0;"|'''15'''
| align="center" style="background:#f0f0f0;"|'''25'''
| align="center" style="background:#f0f0f0;"|'''40'''
| align="center" style="background:#f0f0f0;"|'''50'''
| align="center" style="background:#f0f0f0;"|'''75'''
| align="center" style="background:#f0f0f0;"|'''100'''
| align="center" style="background:#f0f0f0;"|'''150'''
| align="center" style="background:#f0f0f0;"|'''200'''
| align="center" style="background:#f0f0f0;"|'''300'''
|-
| Etched depth (µm)||61||70||76||86||94||100||111||126||139||143||153||158||163||165||168
|-
| Av. ER (µm/min)||6,1||6,9||7,6||8,6||9,3||9,9||11,0||12,5||13,8||14,2||15,2||15,6||16,2||16,4||16,7
|-
| Av. Scllp hght (nm)||1117||1267||1390||1568||1704||1810||2014||2287||2526||2602||2786||2868||2967||3007||3054
|-
| Sdwall bowing (%)||0,22||0,31||0,30||0,46||0,39||0,55||0,41||0,20||-0,04||-0,33||-0,25||-0,19||-0,13||-0,13||-0,21
|-
| Sdwall angle (degs)||89,7||90,1||90,2||90,4||90,5||90,4||90,2||89,9||90,0||89,9||90,2||90,4||90,8||90,9||91,3
|-
| Trench width (µm)||4,5||5,4||6,7||9,0||11,4||13,4||19,1||30,0||45,0||56,2||82,3||108,4||156,3||207,5||308,3
|-
|}
|-
| January 2013
| Travka50, AZ 5214, '''50% open'''
| Process A 55 cycles or 10:05 minutes, '''C01548.05'''
|
| [[file:C01548.05 003mu 0058.jpg |75px|frameless ]]
| [[file:C01548.05 004mu 0059.jpg |75px|frameless ]]
| [[file:C01548.05 006mu 0060.jpg |75px|frameless ]]
| [[file:C01548.05 008mu 0061.jpg |75px|frameless ]]
| [[file:C01548.05 010mu 0062.jpg |75px|frameless ]]
| [[file:C01548.05 015mu 0063.jpg |75px|frameless ]]
| [[file:C01548.05 025mu 0064.jpg |75px|frameless ]]
| [[file:C01548.05 040mu 0065.jpg |75px|frameless ]]
| [[file:C01548.05 050mu 0066.jpg |75px|frameless ]]
| [[file:C01548.05 050mu 0131.jpg |75px|frameless ]]
| [[file:C01548.05 075mu 0067.jpg |75px|frameless ]]
| [[file:C01548.05 100mu 0068.jpg |75px|frameless ]]
| [[file:C01548.05 200mu 0069.jpg |75px|frameless ]]
| [[file:C01548.05 300mu 0070.jpg |75px|frameless ]]
|
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
| align="center" style="background:#f0f0f0;"|'''2'''
| align="center" style="background:#f0f0f0;"|'''3'''
| align="center" style="background:#f0f0f0;"|'''4'''
| align="center" style="background:#f0f0f0;"|'''6'''
| align="center" style="background:#f0f0f0;"|'''8'''
| align="center" style="background:#f0f0f0;"|'''10'''
| align="center" style="background:#f0f0f0;"|'''15'''
| align="center" style="background:#f0f0f0;"|'''25'''
| align="center" style="background:#f0f0f0;"|'''40'''
| align="center" style="background:#f0f0f0;"|'''50'''
| align="center" style="background:#f0f0f0;"|'''75'''
| align="center" style="background:#f0f0f0;"|'''100'''
| align="center" style="background:#f0f0f0;"|'''150'''
| align="center" style="background:#f0f0f0;"|'''200'''
| align="center" style="background:#f0f0f0;"|'''300'''
|-
| Etched depth (µm)||||62||67||75||81||86||94||105||113||118||123||125||129||131||133
|-
| Av. ER (µm/min)||||6,2||6,7||7,5||8,0||8,5||9,3||10,4||11,2||11,7||12,2||12,4||12,8||13,0||13,2
|-
| Av. Scllp hght (nm)||||1132||1223||1370||1472||1565||1706||1906||2061||2142||2234||2277||2355||2379||2412
|-
| Sdwall bowing (%)||||0,42||0,61||0,39||0,36||0,41||0,38||0,39||0,52||0,24||0,36||0,47||0,63||0,59||0,32
|-
| Sdwall angle (degs)||||89,9||89,8||90,0||90,1||90,5||90,7||91,1||91,3||91,6||91,8||92,1||92,3||92,4||92,6
|-
| Trench width (µm)||||5,1||6,7||9,3||11,4||13,7||18,6||29,0||44,5||54,4||80,5||106,7||156,9||207,4||310,1
|-
|}
|}


== Process A variations May-June 2016 ==
== Process A variations May-June 2016 ==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/processA"