Specific Process Knowledge/Etch/Etching of Bulk Glass: Difference between revisions

Revision as of 12:48, 11 March 2008 view source Fj (talk \| contribs) Bureaucrats, danchip, Administrators 143 edits →Wet HF-etch of bulk glass ← Older edit		Revision as of 12:49, 11 March 2008 view source Fj (talk \| contribs) Bureaucrats, danchip, Administrators 143 edits No edit summary Newer edit →
Line 1:		Line 1:
	At Danchip, we have two types of bulk glass substrates: Borosilicate glass (Borofloat 33 (like pyrex)) and fused ~~silicate~~ glass which in cleanliness is similar to quartz. Both types are etched wet in a special set-up placed in a fumehood using a strong HF-solution (isotropic etch).		At Danchip, we have two types of bulk glass substrates: Borosilicate glass (Borofloat 33 (like pyrex)) and fused silica glass which in cleanliness is similar to quartz. Both types are etched wet in a special set-up placed in a fumehood using a strong HF-solution (isotropic etch).
	The set-up consists of a 5 l plasic beaker placed on a stirring plate (magnetic stirring) and a special horizontal wafer holder. Normally a 40% pre-mixed HF solution is used.		The set-up consists of a 5 l plasic beaker placed on a stirring plate (magnetic stirring) and a special horizontal wafer holder. Normally a 40% pre-mixed HF solution is used.