Specific Process Knowledge/Etch/Etching of Bulk Glass: Difference between revisions
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Regarding borosilicate glass masking is more tricky. The follwing sequence has been used with some success (using sputtered silicon from the Alcatel): | Regarding borosilicate glass masking is more tricky. The follwing sequence has been used with some success (using sputtered silicon from the Alcatel): | ||
* Piranha clean | |||
* Bake-out at 250 C (>2,5 hours) | |||
* | |||
40% HF 3µm/min | 40% HF 3µm/min | ||