Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
| Line 392: | Line 392: | ||
! PrA-0 <!-- step --> | ! PrA-0 <!-- step --> | ||
| 20 <!-- chiller temp --> | | 20 <!-- chiller temp --> | ||
| 4 <!-- dep time --> | |||
| 25 <!-- dep pressure --> | | 25 <!-- dep pressure --> | ||
| 200 <!-- C4F8 flow --> | | 200 <!-- C4F8 flow --> | ||
| Line 403: | Line 403: | ||
| 140(1.5s) 45 <!-- platen power --> | | 140(1.5s) 45 <!-- platen power --> | ||
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]] <!-- link processes --> | | rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]] <!-- link processes --> | ||
| rowspan="2" | | | rowspan="2" | Step 2 original recipe <!-- keywords --> | ||
|- | |- | ||
! PrA-1 <!-- step --> | |||
| 20 <!-- chiller temp --> | |||
! 3.5 <!-- dep time --> | |||
| 25 <!-- dep pressure --> | |||
| 200 <!-- C4F8 flow --> | |||
| 2000 <!-- coil power --> | |||
| 7.0 <!-- etch time --> | |||
| 25(1.5s) 150 <!-- etch pressure --> | |||
| 350(1.5s) 550 <!-- SF6 flow --> | |||
| 5 <!-- O2 flow --> | |||
| 2800 <!-- coil power --> | |||
| 140(1.5s) 45 <!-- platen power --> | |||
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]] <!-- link processes --> | |||
| rowspan="2" | Shorter dep cycle <!-- keywords --> | |||
|- | |||
! PrA-2 <!-- step --> | |||
| 20 <!-- chiller temp --> | |||
| 4 <!-- dep time --> | |||
| 25 <!-- dep pressure --> | |||
! 150 <!-- C4F8 flow --> | |||
| 2000 <!-- coil power --> | |||
| 7.0 <!-- etch time --> | |||
| 25(1.5s) 150 <!-- etch pressure --> | |||
| 350(1.5s) 550 <!-- SF6 flow --> | |||
| 5 <!-- O2 flow --> | |||
| 2800 <!-- coil power --> | |||
| 140(1.5s) 45 <!-- platen power --> | |||
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]] <!-- link processes --> | |||
| rowspan="2" | Lower C<sub>4</sub>F<sub>8</sub> flow in dep cycle <!-- keywords --> | |||
|- | |||
|} | |} | ||