Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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| 2800 <!-- coil power --> | | 2800 <!-- coil power --> | ||
| 140(1.5s) 45 <!-- platen power --> | | 140(1.5s) 45 <!-- platen power --> | ||
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]] <!-- link processes --> | | rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]] <!-- link processes --> | ||
| rowspan="2" | <!-- keywords --> | | rowspan="2" | <!-- keywords --> | ||
|- | |- | ||
|} | |} | ||