Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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== Process A variations May-June 2016 == | == Process A variations May-June 2016 == | ||
Process A | Process A may overpassivate producing grass. To investigate the results | ||
{| border="1" cellpadding="1" cellspacing="1" style="text-align:center;" | {| border="1" cellpadding="1" cellspacing="1" style="text-align:center;" | ||
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! rowspan="2" width="20"| Temp. | ! rowspan="2" width="20"| Temp. | ||
! colspan="4" | Deposition step | ! colspan="4" | Deposition step | ||
! colspan=" | ! colspan="6" | Etch step | ||
! colspan="3" | Comments | ! colspan="3" | Comments | ||
|- | |- | ||
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! Coil | ! Coil | ||
! Time | ! Time | ||
! | ! Pressure | ||
! SF<sub>6</sub> | ! SF<sub>6</sub> | ||
! O<sub>2</sub> | ! O<sub>2</sub> | ||
! Coil | ! Coil | ||
! Platen | ! Platen | ||
! Runs | ! Runs | ||
! width="100" | Key words | ! width="100" | Key words | ||