Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1: Difference between revisions
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| 6/6-2016 | |||
| 6" | |||
| travka35 wafer 1.5 µm AZ | |||
| Si / 35 % | |||
| Pegasus/jmli | |||
| | |||
| standard/danchip/mediumiso1 2:00 minutes | |||
| S006534 | |||
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|- | |||
| 6/6-2016 | |||
| 6" | |||
| travka35 wafer 1.5 µm AZ | |||
| Si / 35 % | |||
| Pegasus/jmli | |||
| | |||
| standard/danchip/mediumiso1 4:00 minutes | |||
| S006535 | |||
| | |||
| | |||
[[file:S006535 066.jpg |120px|frameless ]] | |||
[[file:S006535069.jpg |120px|frameless ]] | |||
[[file:S006534 067.jpg |120px|frameless ]] | |||
[[file:S006534 068.jpg |120px|frameless ]] | |||
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