Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions
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Revision as of 08:59, 24 June 2016
| Recipe | Step | Temperature | Pressure | C4F8 | SF6 | O2 | Ar | Coil | Platen | Runs | Key words |
|---|---|---|---|---|---|---|---|---|---|---|---|
| mediumiso1 | - | 20 | 25 | 0 | 150 | 0 | 0 | 600 | 3 | 1 | NA |
| - |