Main Page/Process Logs/jmli/Pegasus/isotropic/mediumiso1: Difference between revisions
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Revision as of 13:50, 30 July 2018
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! rowspan="2" width="40"| Date
! colspan="4" width="120"| Substrate Information
! colspan="4" | Process Information
! rowspan="2" width="500" |SEM Images
|-
! width="30" | Wafer info
! width="40" | Mask
! width="40" | Material/ Exposed area
! width="40" | Tool / Operator
! width="40" | Conditioning
! width="40" | Recipe
! width="40" | Wafer ID
! width="40" | Comments
|-
| 9/4-2014
| 4"
| travka05 wafer 1.5 µm AZ
| Si / 5 %
| Pegasus/jmli
| 5 minute TDESC clean + MU runs
| jml/isotropic/mediumiso1 2:00 minutes
| S003961
|
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|-
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