|
|
| Line 1: |
Line 1: |
| {| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
| |
| |+ '''Mediumiso'''
| |
| |-
| |
| ! rowspan="2" width="100"| Recipe
| |
| ! rowspan="2" width="20"| Step
| |
| ! rowspan="2" width="20"| Temp.
| |
| ! colspan="6" | Deposition step
| |
| ! colspan="7" | Etch step
| |
| ! colspan="3" | Process observations
| |
| |-
| |
| ! Time
| |
| ! Pres.
| |
| ! C<sub>4</sub>F<sub>8</sub>
| |
| ! SF<sub>6</sub>
| |
| ! O<sub>2</sub>
| |
| ! Coil
| |
| ! Time
| |
| ! Pres.
| |
| ! C<sub>4</sub>F<sub>8</sub>
| |
| ! SF<sub>6</sub>
| |
| ! O<sub>2</sub>
| |
| ! Coil
| |
| | [[Main Page/Process Logs/jmli/Parameters#Platen power|Platen]]
| |
| | [[Main Page/Process Logs/jmli/Parameters#Hardware | HW]]
| |
| ! Runs
| |
| ! width="100" | Key words
| |
| |-
| |
| ! mediumiso1 <!-- recipe name -->
| |
| | - <!-- step -->
| |
| | 20 <!-- chiller temp -->
| |
| | NA <!-- dep time -->
| |
| | NA <!-- dep pressure -->
| |
| | NA <!-- C4F8 flow -->
| |
| | NA <!-- SF6 flow -->
| |
| | NA <!-- O2 flow -->
| |
| | NA <!-- coil power -->
| |
| | NA <!-- etch time -->
| |
| | 25 <!-- etch pressure -->
| |
| | 0 <!-- C4F8 flow -->
| |
| | 150 <!-- SF6 flow -->
| |
| | 0 <!-- O2 flow -->
| |
| | 600 <!-- coil power -->
| |
| | 3 <!-- platen power -->
| |
| | - <!-- hardware setting -->
| |
| | [[Main Page/Process Logs/jmli/Pegasus/isotropic/mediumiso1 | 1]] <!-- link processes -->
| |
| | NA <!-- keywords -->
| |
| |-
| |
| ! - <!-- recipe name -->
| |
| | <!-- step -->
| |
| | <!-- chiller temp -->
| |
| | <!-- dep time -->
| |
| | <!-- dep pressure -->
| |
| | <!-- C4F8 flow -->
| |
| | <!-- SF6 flow -->
| |
| | <!-- O2 flow -->
| |
| | <!-- coil power -->
| |
| | <!-- etch time -->
| |
| | <!-- etch pressure -->
| |
| | <!-- C4F8 flow -->
| |
| | <!-- SF6 flow -->
| |
| | <!-- O2 flow -->
| |
| | <!-- coil power -->
| |
| | <!-- platen power -->
| |
| | <!-- hardware setting -->
| |
| | <!-- link processes -->
| |
| | <!-- keywords -->
| |
| |-
| |
| |}
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
|
| |
|
