Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions
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| 150 <!-- SF6 flow --> | | 150 <!-- SF6 flow --> | ||
| 0 <!-- O2 flow --> | | 0 <!-- O2 flow --> | ||
| 0 <!-- Ar flow --> | |||
| 600 <!-- coil power --> | | 600 <!-- coil power --> | ||
| 3 <!-- platen power --> | | 3 <!-- platen power --> | ||
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| NA <!-- keywords --> | | NA <!-- keywords --> | ||
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! | ! - <!-- recipe name --> | ||
| <!-- step --> | | <!-- step --> | ||
| <!-- chiller temp --> | | <!-- chiller temp --> | ||