Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

← Older editNewer edit →
VisualWikitext
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
No edit summary
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
No edit summary
Line 91: Line 91:
! width="50"| Coil  
! width="50"| Coil  
! width="50"| Platen
! width="50"| Platen
! colspan="2" | Process observations
! width="50"| Runs
|-
! Runs
! width="100" | Key words
! width="100" | Key words
|-
|-
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic"