Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetch: Difference between revisions

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 | -       <!-- hardware setting -->
 ! [[Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetch/polySOI10a | 200+]]       <!-- link processes -->
-| very stable, excellent and extensive track record     <!-- keywords -->
+| Works only with limited open area - probably less than 20 %, very stable, excellent and extensive track record     <!-- keywords -->
 |-
 |}