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Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions

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HEIMAP is a sub program that measures height of the substrate with an IR laser. The incidence angle of the laser is 73 degrees.
HEIMAP is a sub program that measures height of the substrate with an IR laser. The incidence angle of the laser is 73 degrees.
'''It has been observed by one uer, that HEIMAP does not work on a SOI wafer coated with a thin layer of e-beam resist and ESPACER''', most liekly due to a Fabry-Perot effect in the substrate. The problem was solved by using thermally evaporated Al instead. The refractive index of Al (at 800 nm) is approximately 2, the refractive index of ESPACER approximately 1.25.
'''It has been observed by one user, that HEIMAP does not work on a SOI wafer coated with a thin layer of e-beam resist and ESPACER''', most liekly due to a Fabry-Perot effect in the substrate. The problem was solved by using thermally evaporated Al instead. The refractive index of Al (at 800 nm) is approximately 2, the refractive index of ESPACER approximately 1.25.


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