Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions
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===Investigation of chemical composition in multilayers system=== | ===Investigation of chemical composition in multilayers system=== | ||
Chemical | Chemical tace analysis has been performed using [[Specific_Process_Knowledge/Characterization/XPS#XPS-ThermoScientific|XPS-ThermoScientific]] equipment in depth profile mode. | ||
<gallery caption="" widths="1000px" heights="1000px" perrow="1"> | <gallery caption="" widths="1000px" heights="1000px" perrow="1"> | ||