Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions

Revision as of 14:19, 19 May 2016

This page describes non standart recipes including multilayers structures.

Recipe: Al2O3LT

Temperature:80-150 ^oC

Recipe: TiO2LT

Temperature: 80-150 ^oC

Recipe: EMA01

Recipe: EMA02

Recipe: EMA03

Recipe: EMA04

Temperature: 120 ^oC

Recipe: Multi T

Temperature: 150 ^oC

Revision as of 14:19, 19 May 2016 view source Eves (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 3,786 edits →‎Low temperature grown multilayers on flat surfaces ← Older edit		Revision as of 14:19, 19 May 2016 view source Eves (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 3,786 edits →‎Al2O3/TiO2 multilayers on high aspect ratio structures Newer edit →
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	Recipe: Multi T		Recipe: Multi T

	Temperature: ~~150C~~		Temperature: 150 <sup>o</sup>C