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Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Temperature: 80-150C
Temperature: 80-150C


==Flat Low temperature grown multilayers==
==Low temperature grown multilayers on flat surfaces==


Recipe: EMA01
Recipe: EMA01
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