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Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions

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BARC DUV42S-6 coating sequences:
BARC DUV42S-6 coating sequences:
*'''(1001) DCH 150mm BARC 65nm''' Dispense 3ml@1000rpm; spin-off 60s@4700rpm; softbake 60s@175°C
*'''(1201) DCH 150mm BARC 65nm''' Dispense 3ml@1000rpm; spin-off 30s@4700rpm; softbake 60s@175°C
*'''(1002) DCH 100mm BARC 65nm''' Dispense 1.6ml@1000rpm; spin-off 60s@4700rpm; softbake 60s@175°C
*'''(1202) DCH 100mm BARC 65nm''' Dispense 1.6ml@1000rpm; spin-off 30s@3000rpm; softbake 60s@175°C
KRF M230Y coating sequences:
KRF M230Y coating sequences:
*'''(1011) DCH 150mm M230Y 360nm''' Dispense 3.9ml@1000rpm; spin-off 60s@2500rpm; softbake 90s@130°C
*'''(1301) DCH 150mm M230Y 360nm''' Dispense 3ml@1000rpm; spin-off 30s@2500rpm; softbake 90s@130°C
*'''(1012) DCH 100mm M230Y 360nm''' Dispense 1ml@1000rpm; spin-off 60s@2500rpm; softbake 90s@130°C
*'''(1302) DCH 100mm M230Y 360nm''' Dispense 1ml@1000rpm; spin-off 30s@2500rpm; softbake 90s@130°C
KRF M35G coating sequences:
KRF M35G coating sequences:
*'''(1021) DCH 150mm M35G 750nm'''
*'''(1401) DCH 150mm M35G 750nm''' Dispense 3ml@1000rpm; spin-off 60s@5000rpm; softbake 90s@130°C
*'''(1022) DCH 100mm M35G 750nm'''
*'''(1402) DCH 100mm M35G 750nm''' Dispense 1ml@1000rpm; spin-off 60s@5000rpm; softbake 90s@130°C
*'''(1023) DCH 150mm M35G 1000nm'''
*'''(1403) DCH 150mm M35G 1000nm''' Dispense 3ml@1000rpm; spin-off 60s@2630rpm; softbake 90s@130°C
*'''(1024) DCH 100mm M35G 1000nm'''
*'''(1404) DCH 100mm M35G 1000nm''' Dispense 1ml@1000rpm; spin-off 60s@26300rpm; softbake 90s@130°C
*'''(1025) DCH 150mm M35G 1400nm'''
*'''(1405) DCH 150mm M35G 1400nm''' Dispense 3ml@1000rpm; spin-off 60s@1310rpm; softbake 90s@130°C
*'''(1026) DCH 100mm M35G 1400nm'''
*'''(1406) DCH 100mm M35G 1400nm''' Dispense 1ml@1000rpm; spin-off 60s@1310rpm; softbake 90s@130°C


== Equipment performance and process related parameters ==
== Equipment performance and process related parameters ==
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