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Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Line 195: Line 195:
   
   
'''Standard processes:'''
'''Standard processes:'''
*DCH ...
*'''(1000) DCH PEB 130C 60s''' 60s baking at 130°C
*'''(1001) DCH PEB 130C 90s''' 90s baking at 130°C
 
*'''(1002) DCH PEB_60s and DEV_60s''' 60s baking at 130°C followed by 60s single puddle development
*'''(1003) DCH PEB_90s and DEV_60s''' 90s baking at 130°C followed by 60s single puddle development
*'''(1004) DCH DEV 60s''' 60s single puddle development


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