Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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''Go back to [[Specific_Process_Knowledge/Lithography/Coaters#Coaters:_Comparison_Table|Coater comparison table]]''. | ''Go back to [[Specific_Process_Knowledge/Lithography/Coaters#Coaters:_Comparison_Table|Coater comparison table]]''. | ||
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| '''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=362 LabManager]''' || '''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 LabManager]''' || '''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=315 LabManager]''' | | '''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=362 LabManager]''' || '''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 LabManager]''' || '''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=315 LabManager]''' | ||
| | |} | ||
'''Training video: [http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater-720p.mp4 LabSpin6]''' | |||
| | Spin curves: [[media:AZ5214E_spin_curve.pdf|AZ5214E]], [[media:Spin_curve_nLoF2020.pdf|AZnLoF 2020]], [[media:Spin_curve_ZEP520A.pdf|ZEP520A]], [[media:Spin_curve_Fox-15.pdf| FOX-15]] | ||