Specific Process Knowledge/Characterization/SEM LEO: Difference between revisions
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|style="background:LightGrey; color:black"|Imaging and measurement of | |style="background:LightGrey; color:black"|Imaging and measurement of | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | * Conducting samples | ||
* Semi-conducting samples | |||
* Thin (~ 5 µm <) layers of non-conducting materials such as polymers | |||
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|style="background:LightGrey; color:black"|Other purpose | |style="background:LightGrey; color:black"|Other purpose | ||